JPH0639468Y2 - セラミックスアクチュエータ - Google Patents

セラミックスアクチュエータ

Info

Publication number
JPH0639468Y2
JPH0639468Y2 JP1988118234U JP11823488U JPH0639468Y2 JP H0639468 Y2 JPH0639468 Y2 JP H0639468Y2 JP 1988118234 U JP1988118234 U JP 1988118234U JP 11823488 U JP11823488 U JP 11823488U JP H0639468 Y2 JPH0639468 Y2 JP H0639468Y2
Authority
JP
Japan
Prior art keywords
ceramic
ceramic layer
layer
ceramics
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988118234U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238759U (en]
Inventor
江里子 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1988118234U priority Critical patent/JPH0639468Y2/ja
Publication of JPH0238759U publication Critical patent/JPH0238759U/ja
Application granted granted Critical
Publication of JPH0639468Y2 publication Critical patent/JPH0639468Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP1988118234U 1988-09-08 1988-09-08 セラミックスアクチュエータ Expired - Lifetime JPH0639468Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988118234U JPH0639468Y2 (ja) 1988-09-08 1988-09-08 セラミックスアクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988118234U JPH0639468Y2 (ja) 1988-09-08 1988-09-08 セラミックスアクチュエータ

Publications (2)

Publication Number Publication Date
JPH0238759U JPH0238759U (en]) 1990-03-15
JPH0639468Y2 true JPH0639468Y2 (ja) 1994-10-12

Family

ID=31362408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988118234U Expired - Lifetime JPH0639468Y2 (ja) 1988-09-08 1988-09-08 セラミックスアクチュエータ

Country Status (1)

Country Link
JP (1) JPH0639468Y2 (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4806850B2 (ja) * 2001-01-24 2011-11-02 パナソニック株式会社 アクチュエータ
JP4580826B2 (ja) * 2005-06-17 2010-11-17 株式会社東芝 マイクロメカニカルデバイス、マイクロスイッチ、容量可変キャパシタ、高周波回路及び光学スイッチ
US9887344B2 (en) * 2014-07-01 2018-02-06 Seiko Epson Corporation Piezoelectric element, piezoelectric actuator device, liquid ejecting head, liquid ejecting apparatus, and ultrasonic measuring apparatus

Also Published As

Publication number Publication date
JPH0238759U (en]) 1990-03-15

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